Te Whakamahinga o ngā Konganuku i roto i te Hanganga Pūrere Ārahi-Haumaru
Ko ngā taputapu hiko-ā-hiko—pērā i ngā transistors, ngā diodes, ngā pūoko, ngā ara iahiko whakauru (ICs), me ngā tukatuka—koinei te pou tuarā o te hangarau hou. Kei muri i ō rātou mahi teitei me te iti haere o ngā rahi kei reira tētahi tukanga hanga matatini, tika, me te tino whakawhirinaki ki ngā rauemi. Ko tētahi rōpū rauemi kāore e taea te whakakapi ko te konganuku. Ka whakamahia ngā konganuku ehara i te mea hei "waea" hiko anake engari hei hononga hiko, hei arai horapa, hei hononga i waenga i ngā wāhanga, me ngā rauemi mahi i roto i ngā tukanga tuhi me te takai. Ka matapakihia e tēnei tuhinga te whakamahinga o ngā konganuku i roto i te hanga taputapu hiko-ā-hiko, ngā momo konganuku e whakamahia whānuitia ana, me ngā wero me ngā ahunga o tō rātou whanaketanga.
1. Te tūranga o ngā konganuku i roto i ngā taputapu haurua-ira
I te nuinga o te wā, he maha ngā mahi matua a ngā konganuku i roto i ngā taputapu haurua-ira:
1. Hononga (waea): Te hono i ngā transistors me ētahi atu wāhanga o te maramara mā roto i ngā ara whakarewa tino matotoru, maha-paparanga (hononga maha-paparanga).
2. Ngā hononga ohmic me ngā hononga Schottky: Ka hangaia he hononga hiko i waenga i te konganuku me te haurua-ā-ira. Ka taea e ngā hononga ohmic te rere o te iahiko i ngā taha e rua me te ātete iti, ko ngā hononga Schottky ia ka hangaia he diode me ngā āhuatanga whakatikatika.
3. Papa ārai me te papa piri: Ka ārai i te horapa o ngā ngota whakarewa ki roto i te rauemi haurua-ira, i te rauemi hiko-kore rānei, ā, ka āwhina i te whakarewa kia piri pūmau ki te papa i raro iho.
4. Te hiko kuaha i runga i te transistor: I roto i ētahi hangarau, ka whakamahia te konganuku hei hanga i te hiko kuaha i runga i te MOSFET kia pai ake ai te whakahaere hongere me te whakaiti i te ātete.
5. Ngā rauemi i roto i te tukanga hanga: Ka whakamahia ngā konganuku me ngā matū konganuku hei ārai mārō, hei paparanga whakaata, hei wāhanga matū rānei mō te whakatakotoranga me te whakairo.
6. Te takai maramara me te hononga: Ka whakamahia te tūhono, te here waea, te pupuhi, me ngā momo koranu whakarewa hei hono i te maramara ki te papa ara iahiko me te tiaki i te taputapu mai i te taiao.
Ara, ko te mahi a ngā maramara hou ehara i te mea ko te silicon me ētahi atu rauemi haurua-ira anake e whakatauhia ana, engari ko te āhua o te whiriwhiri me te whakaurunga o ngā konganuku.
2. Ngā konganuku mō ngā hononga: mai i te konumohe ki te parahi me te konukōre
I ngā whakatupuranga tōmua o ngā IC, ko te konumohe (Al) te mea matua i whiriwhiria mō ngā hononga honohono nā te mea he ngāwari ki te whakatakoto, he iti te utu, ā, he hototahi ki ngā tukanga hanga o taua wā. Heoi, i te pikinga ake o ngā kiato transistor me te pikinga ake o ngā whakaritenga iahiko, ko ngā raruraru pēnei i te hekenga hiko—te nekehanga o ngā ngota whakarewa nā te rere nui o te irahiko—i puta ai ngā pakaru ara me te hekenga o te pono.
Kātahi ka tahuri te umanga ki te parahi (Cu) nā te mea he iti ake tōna ātete i te konumohe, ka whakaiti i te ngaronga hiko me te whakanui ake i te tere tohu. Heoi, he wero te parahi: ka horapa tere te Cu ki roto i ngā matū whakapūngao (hei tauira, te SiO₂, ngā matū whakapūngao iti-k rānei) ā, ka taea te whakaiti i ngā āhuatanga hiko. Nō reira, tata tonu te whakamahinga o te Cu me te paparanga ārai pērā i te tantalum (Ta) te tantalum nitride rānei (TaN).
I roto i ngā hangarau e iti haere ana (ngā pona matatau), ka whakaitihia te whakawhiti-wāhanga hononga, ka piki ake te ātete, ā, ka kaha ake ngā pānga rohe (te marara o te mata). Mō ētahi paparanga, kua tīmata te puta ake o te whakamahinga o te cobalt (Co) me te ruthenium (Ru) hei whakakapi/tāpiri ki te Cu nā te mea ka taea e ia te whakarato i te mahi pumau ake i ngā rahinga tino iti, ā, ka whakaitihia te hiahia mō ngā ārai matotoru.
3. Ngā hononga whakarewa-haurua-arataki: ohmic me Schottky
Ko te pā o te konganuku me te haurua-ira tētahi o ngā āhuatanga tino nui. Mēnā he nui rawa te ātete o te pā, ka tere te wera o te transistor, ā, ka ngaro te mahi. I roto i ngā taputapu CMOS hou, kua hangaia ngā pā pūtake/waikeri me ngā mono pā kia iti rawa te ātete.
Ko ētahi o ngā konganuku me ngā matū e whakamahia whānuitia ana mō ngā hononga ko:
– Titanium (Ti): he mea whakamahi pinepine hei piripiri me te paparanga tauhohe hei hanga i ngā matū silica.
– Nikara (Ni) me te konukura (Co): he mea noa i roto i ngā tukanga whakapūkara (hei tauira, NiSi, CoSi₂) hei whakaiti i te ātete pa i roto i te silicon.
– Te Tungsten (W): e whakamahia whānuitia ana hei "mono" hei whakakī i ngā kōhao whakapā (whakakī whakapā/mā te whakakī) nā te mea he pumau, he pai hoki mō te whakatakotoranga CVD (te whakatakotoranga kohu matū).
– Platinum (Pt) te palladium rānei (Pd): ka taea te whakamahi hei hanga hononga Schottky, hei whakamahi rānei mō ētahi tono e hiahia ana kia tino pumau te matū.
I roto i ngā taputapu i hangaia mai i ngā haurua-ā-ira ehara i te silicon—pērā i te GaN (gallium nitride) me te SiC (silicon carbide)—ka nui haere te hiranga o te kōwhiringa o te konganuku whakapā nā ngā rerekētanga o te hanganga o te awhi pūngao, ngā whakaritenga pāmahana teitei, me ngā taiao mahi tino kino (hei tauira, ngā hikohiko mana).
4. Papa ārai, papa ārai, me te papa piri
Nā te iti o ngā maramara hou, ka horapa ngā ngota whakarewa, ka puta he turuturu, he poto, he huringa rānei o ngā tawhā transistor. Nō reira, ka whakamahia ngā paparanga angiangi, e mahi ana i ēnei mahi:
– Ārai horapa: ka ārai i te horapa o te Cu me ētahi atu konganuku.
– Raina: ka āwhina ki te whakakī i ngā āhuatanga whaiti (awaawa/mā roto) kia ōrite.
– Paparanga piri: ka whakanui ake i te piri.
Ko ngā rauemi noa ko Ta/TaN, Ti/TiN, W, ā, i roto i ngā rangahau hou ake nei, ko Ru, ngā arai e ahu mai ana i te Mn, ngā paparanga tino angiangi rānei e ahu mai ana i ngā rauemi 2D hei arai horapa. I te whanaketanga o ngā pona, ko te wero ko te hanga i te arai kia angiangi rawa atu me te noho whai hua tonu, nā te mea ka "kai" te arai matotoru rawa i te wāhi ara, ā, ka whakanui ake i te ātete.
5. Te whakarewa i roto i te hanganga transistor: te kuaha whakarewa me te k-teitei
I roto i ngā transistors MOSFET hou, inā koa mai i te whakaurunga o ngā kēti k-teitei/whakarewa, kua whai wāhi nui anō te whakarewa ki te hanganga kēti. I mua, he maha ngā wā i whakamahia ai ngā kēti polysilicon, engari i pāngia rātou e ngā raruraru pēnei i te pānga whakaheke me te hototahitanga ki ngā dielectrics k-teitei. Mā ngā kēti whakarewa, ka pai ake te whakahaere hiko ā-pūmau, ā, ka taea te pehi i te turuturu.
He rerekē ngā rauemi e whakamahia ana, pērā i te titanium nitride (TiN), te tantalum nitride, te huinga rānei o ngā konganuku i hangaia kia tika ai te mahi (kia tutuki ai te ngaohiko paepae ki te hoahoa). I konei, ehara te konganuku i te mea he kaiārahi noa iho; ko ōna āhuatanga hiko mata e whakatau ana i te whanonga o te transistor.
6. Te whakamahinga o te konganuku i roto i ngā tukanga whakatakoto me te hanga tauira
Ko te hanga maramara he whakatakotoranga o ngā paparanga angiangi o te konganuku mā roto i ngā tikanga maha, tae atu ki:
– PVD (Te Whakatakotoranga Kohu Tinana): pērā i te pupuhi, he mea noa mō te Al, Ti, Ta, me ētahi atu.
– CVD (Te Whakatakotoranga Kohu Matū): e whakamahia ana mō ngā mono W (tungsten) me ētahi paparanga whakarewa.
– ALD (Whakatakotoranga Papanga Atomika): he mea tino nui mō ngā paparanga tino angiangi me ngā paparanga āhua rite i runga i ngā hanganga 3D, hei tauira, ngā arai/ngā raina, ngā kēti whakarewa, me ētahi rauemi whakapā.
I muri i te whakatakotoranga, me tātauira te konganuku mā te whakamahi i te lithography me te etching, te tukanga damascene rānei (ina koa mō te Cu), arā, ko te hanga i ngā awaawa i roto i te dielectric, te whakakī i ngā mea ki te konganuku, kātahi ka whakakanapahia mā te whakamahi i te Chemical Mechanical Planarization (CMP). Me whakamahi te paru me te matū tika mō tēnei tukanga hei hanga i tētahi mata papatahi me te kore e kino ngā paparanga o raro.
7. Te whakarewa i runga i te takai: te whakapiri, te pupuhi, me te here waea
Kia oti te hanga i te anga, ka tapahia (tapahia) te maramara, ka tākaihia. I tēnei wā, ko te konganuku te mea matua:
– Ko te hononga waea he waea koura (Au), konumohe (Al), parahi (Cu) rānei.
– Ko ngā pou/pūpū whakarewa me te whakapiripiri hei hanga i ngā hononga tere me te maha o ngā titi hei hanga i ngā patupatu me ngā maramara hurihuri.
– Ko ngā tūhono hou he mea hanga ki te tine (Sn) me ngā koranu (hei tauira, Sn-Ag-Cu) hei whakakapi i te tūhono mata (Pb) mō ngā take taiao.
Ko ngā takai matatau pēnei i ngā maramara maramara, te whakaurunga 2.5D/3D, me te TSV (mā roto i te silicon mā) kei te whakanui ake i te hiahia mō ngā rauemi whakarewa pono-teitei, i te mea ka nui haere te mātotoru hononga me te marara wera.
8. Ngā wero matua: te hekenga hiko, te waikura, me te ātete i te tauine nano
I te iti haere o ngā rahinga, ka pā mai ngā wero nui ki te whakamahinga o te konganuku, tae atu ki:
– Te hekenga hiko: ka pakaru pea ngā ara whakarewa i ngā iahiko teitei i ngā wāhanga iti.
– Te pikinga ake o te ātete whai hua: i te ine nano, ka nui ake te tukinga o ngā irahiko ki ngā rohe me ngā mata o te kōpaka, ka piki ake te ātete.
– Te hototahitanga o te waikura me te matū: inā koa i ngā wāhanga whakaputa e whakamahi ana i te maha o ngā matū me ngā pāmahana teitei.
– Ngā herenga ārai: me angiangi ake ngā ārai, me te ātete tonu ki te horapa, he mahi uaua tēnei.
Nō reira, kei te haere tonu te whanaketanga o ngā rangahau mō ngā rauemi whakarewa mō ngā haurua-ira, tae atu ki te tūhuratanga o te Co, Ru, Mo, me ngā huarahi hou pērā i ngā hononga rauemi rerekē me ngā tikanga whakatakotoranga ngota.
9. Ngā huarahi whakamahinga whakarewa ā muri ake nei
Ko ngā au o te ao hiko ā muri ake nei kei te akiaki i te whakamahinga o ngā konganuku "hangaia" i te taumata ngota. Ko ngā pūnga matatau me ngā hoahoa 3D (FinFET, GAA nanosheet, me ētahi atu) e hiahia ana ki ngā paparanga konganuku tino ōrite, tino angiangi me ngā atanga ma. Hei tāpiri, ko te hiahia mō te whai huatanga o te pūngao me te tere ka waiho ko te whiriwhiri i ngā konganuku mō ngā hononga me ngā whakapā hei mea nui.
I te taha o te takai, ko ngā whakaritenga whānui-rahi me te whakaurunga kanorau kei te akiaki i te auahatanga i roto i ngā hononga whakarewa, pū, me ngā hononga whakarewa. Ehara i te mea he wāhanga tautoko noa iho te whakarewa, engari he wāhanga taketake o te hoahoa pūnaha, te mahi, me te pono.
Whakamutunga
He mahi nui tā ngā konganuku i roto i te hanganga o ngā taputapu haurua-ira: hei hononga, hei hononga, hei ārai, hei kuaha konganuku, hei pou tuara hoki mō te takai. Ehara i te mea ko te kawe hiko anake te mea e whakatauhia ana te kōwhiringa konganuku, engari ko te horapa, te piri, te pumau o te wera, te hototahitanga o ngā tukanga, me te pono mō te wā roa. I te piki haere o te whakaitiiti me te uauatanga, ko ngā wero pēnei i te hekenga hiko me te ātete nanoscale kei te akiaki i te umanga ki te whakawhanake i ngā rauemi me ngā tukanga hou. Nō reira, he mea nui te mārama ki te whakamahinga o ngā konganuku i roto i ngā haurua-ira, ehara i te mea mō ngā kaihanga rauemi me ngā tukanga anake, engari mō te hunga katoa e rapu ana ki te mārama me pēhea te whanaketanga tonu o te hangarau maramara hou.
